TITLE

Detection of particles of less than 5 nm in diameter formed in an argon–silane capacitively coupled radio-frequency discharge

AUTHOR(S)
Boufendi, L.; Gaudin, J.; Huet, S.; Viera, G.; Dudemaine, M.
PUB. DATE
December 2001
SOURCE
Applied Physics Letters;12/24/2001, Vol. 79 Issue 26, p4301
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A method for the detection of dust particles occurring in silane–argon gas mixture plasmas is presented. It is based on the spectral analysis of the radio-frequency current. The amplitudes of the fundamental (13.56 MHz) and second harmonics (40.68 MHz) are very sensitive to the presence of the earlier nanoparticles when their size is in the range of 2–3 nm even if their influence on the capacitive character of the impedance is negligible. This method is nonperturbative, with a temporal resolution in the microsecond range, very easy to implement, and can thus be used for industrial reactors. © 2001 American Institute of Physics.
ACCESSION #
5742058

 

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