Lattice parameters of wurtzite Al[sub 1-x]Si[sub x]N ternary alloys

Taniyasu, Yoshitaka; Kasu, Makoto; Kobayashi, Naoki
December 2001
Applied Physics Letters;12/24/2001, Vol. 79 Issue 26, p4351
Academic Journal
Lattice constants and bond lengths of wurtzite Al[sub 1-x]Si[sub x]N ternary alloys (0≤x≤0.08) were determined by reciprocal lattice maps around Al[sub 1-x]Si[sub x]N (0002) and (11–24) reflections. The measured lattice constants obtained directly from as-grown Al[sub 1-x]Si[sub x]N layers were scattered because they include the factor of residual strain. Therefore, the lattice constants in the strain-free case were calculated from the measured lattice constants taking the residual strain into account. We found that the a-axis and c-axis lattice constants of the strain-free Al[sub 1-x]Si[sub x]N linearly decreased with the Si content as a[sub 0]=3.1113-0.1412x (Å) and c[sub 0]=4.9814-0.2299x (Å). Further, we obtained the bond length as d[sub 0]=1.86818-0.0862x (Å). The bond length is nearly equal to the interpolation between the Al–N bond and the Si–N bond. © 2001 American Institute of Physics.


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