Determination of residual stresses in Pb(Zr[sub 0.53]Ti[sub 0.47])O[sub 3] thin films with Raman spectroscopy

Xu, Wei-Hua; Lu, Dexin; Zhang, Tong-Yi
December 2001
Applied Physics Letters;12/17/2001, Vol. 79 Issue 25, p4112
Academic Journal
The present work uses Raman spectra to measure residual stresses in Pb(Zr[sub 0.53]Ti[sub 0.47])O[sub 3] thin films. Based on thermodynamic analysis, a linear relationship is found between the stress and the square of the Raman frequency in the A[sub 1] [transverse optical[sub 3] (TO[sub 3])] and E [longitudinal optical[sub 3] (LO[sub 3])] modes. We calibrate the linear relationship by measuring the Raman spectra of stressed bulk Pb(Zr[sub 0.53]Ti[sub 0.47])O[sub 3] samples. Then, we assess residual stresses in the lead zirconate titanate thin films at different thicknesses and different annealing temperatures. The residual stresses extracted from the A[sub 1](TO[sub 3]) mode are consistent with those from the E(LO[sub 3]) mode, which are more or less the same as those measured by the x-ray diffraction sin[sup 2] ψ method. © 2001 American Institute of Physics. [DOI: 10.1063/1.1426271].


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