Elemental mapping with an X-ray fluorescence imaging microscope

Yamamoto, Kimitake; Watanabe, Norio; Takeuchi, Akihisa; Takano, Hidekazu; Aota, Tatuya; Kumegawa, Masaru; Ohigashi, Takuji; Tanoue, Ryuichi; Yokosuka, Hiroki; Aoki, Sadao
May 2000
AIP Conference Proceedings;2000, Vol. 507 Issue 1, p259
Academic Journal
An X-ray fluorescence (XRF) imaging microscope with a Wolter-type grazingincidence mirror as an objective was constructed at the beamline 39XU of SPring-8 (8GEV, 70mA) at Japan Synchrotron Radiation Institute. The monochromatic undulator X-rays in the energy range of 6-10kev were used to produce XRF of a specimen. The microscope system was set normal to the incident beam to reduce elastic scattering from a specimen and to improve signal/background ratio. The two-dimensional elemental mappings of a test specimen (Cu, Ni, Fe wires) and inclusions (Fe, Co, Ni) in a synthesized diamond could be obtained by utilizing the absorption edges of the corresponding elements.


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