TITLE

Composition mapping considerations in scanning soft x-ray microscopy

AUTHOR(S)
Buckley, C. J.
PUB. DATE
May 2000
SOURCE
AIP Conference Proceedings;2000, Vol. 507 Issue 1, p33
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The effects of distortion to absorption measurements made in the soft x-ray region are considered in this paper. The effects of background radiation, spectral contamination, resolving power and detector non-linearity is discussed within the context of what is required for quantitative compositional mapping.
ACCESSION #
5664408

 

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