Performance of the CAMD microprobe utilizing a Kirkpatrick-Baez mirror system

Mo¨lders, Nicholas; Schilling, Paul J.; Schoonmaker, Jon M.
May 2000
AIP Conference Proceedings;2000, Vol. 507 Issue 1, p373
Academic Journal
A Kirkpatrick-Baez micro-focusing system has been implemented at the CAMD X-ray microprobe beamline. The system utilizes gold-coated float glass mirrors at grazing incidence angles that can be varied up to 15 mrad. Dynamically controlled 4-point bending mechanisms are used to approximate elliptical surfaces. The mirrors were characterized for slope error and roughness considerations with regard to the effective focusing based on the source characteristics and geometry. Ordinary float glass blanks were used after a screening process based on slope error. The measured focused spot size compares well with results of ray-tracing and simple geometric optics calculations. The focused spot size is ∼ 18.8 μm × 7.0 μm (δ), with the limiting factor being the size of the CAMD source. Using such a mirror system accommodates operation in both monochromatic and polychromatic (‘white”) modes. The system therefore allows performance of micro-fluorescence measurements using polychromatic light and micro-XANES measurements over an energy range of 2000 eV - 12000 eV. Characterization of the focusing system and tests of the spectro-microscopy and microspectroscopy capabilities are presented.


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