Experimental investigation of soft x-ray diffraction

Xu, Xiangdong; Hong, Yilin; Huo, Tonglin; Jiang, Shipiing; Shan, Xiaobin; Yang, Shaoguang; Fu, Shaojun
May 2000
AIP Conference Proceedings;2000, Vol. 507 Issue 1, p501
Academic Journal
The experimental study on soft x-ray diffraction using gold test objects has been carried out with synchrotron radiation at NSRL. Some images, which correspond to 0, 2 and 80 mm away from a specimen, were recorded as relief pattern on photoresist with use of 3.2nm x-rays from U12A bemtine. The experimental result shows that patterns vary with the distance between specimen and photoresist detector, which is in excellent agreement with the theoretical one.


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