TITLE

Development of a soft x-ray dark-field imaging microscope

AUTHOR(S)
Takano, Hidekazu; Aoki, Sadao
PUB. DATE
May 2000
SOURCE
AIP Conference Proceedings;2000, Vol. 507 Issue 1, p55
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A soft x-ray dark-field imaging microscope with Wolter-type mirrors was constructed in a laboratory scale. An annular aperture stop was used to cut off the undeviated beam, which satisfied the dark-field condition. The image was formed with only scattered x-rays from the object. It provides not only absorption but also phase shift information. Especially, the x-rays that have particular diffraction angle form the dark-field images in this system because Wolter mirror has a thin annular aperture. And the structures of 110-460nm in the object was emphasized for 5.2nm x-rays.
ACCESSION #
5664359

 

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