TITLE

Fabrication of thick zone plates for multi-kilovolt X-rays

AUTHOR(S)
Du¨vel, A.; Rudolph, D.; Schmahl, G.
PUB. DATE
May 2000
SOURCE
AIP Conference Proceedings;2000, Vol. 507 Issue 1, p607
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Phase zone plates for multi-kilovolt X-rays with an outermost zone width of 16.9-30 nm and aspect ratios up to 177 were generated by a sputtered-sliced technology. The generated lenses of alternating Ni80Cr20 and SiO[sub 2] consist of 188-365 layers on borosilicate glass wires and were polished by mechanical and ion processes to a thickness of 3-4 μm without carrier foil. The groove efficiency was measured at the ESRF beamline ID 21 up to 3.8% in first order. But small parts of a zone plate show an efficiency of about 10-15%.
ACCESSION #
5664349

 

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