Phase zone plates for hard X-ray focusing

Vladimirsky, Yuli
May 2000
AIP Conference Proceedings;2000, Vol. 507 Issue 1, p615
Academic Journal
The major obstacle for constructing a deep UV or X-ray lens is the low refraction and high absorption of materials in this region. Only a few Fresnel zones are utilized, so the diameter of an X-ray lens is of the order few microns, and the resolution is hardly better than that of a pinhole. The thickness of a phase zone plates (ZP) is determined by the refraction of the material. To provide π phase shift and form a hard x-ray phase ZP a thickness of a few microns is required. Approaches and techniques developed at the Center for X-ray Lithography (CXrL) for producing thick phase ZPs are presented.


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