Soft x-ray reflectivity and structure evaluation of Ni/Ti and Ni-N/Ti-N multilayers

Takenaka, Hisataka; Muramatsu, Yasuji; Hayashi, Shigeki; Ito, Hisashi; Ueno, Yuko; Moriya, Naoji; Gullikson, Eric M.; Perera, Rupert C. C.
May 2000
AIP Conference Proceedings;2000, Vol. 507 Issue 1, p714
Academic Journal
We fabricated Ni/Ti and Ni-N/Ti-N multilayers structures containing N mirrors use as a grazing-incident angle reflector to focus x-ray micro-beams. The multilayer structures were fabricated by magnetron sputtering. The layer structures were evaluated by using an x-ray diffractometer and the soft x-ray reflectivities were measured at Beamline 6.3.2 at the Advanced Light Source (ALS). Although the Ni/Ti multilayer has a high interface roughness of about 1.36 nm, the soft-x-ray peak reflectivity of this mirror showed fairly high reflectivity of 39%, at just above the Ti-absorption edge with a 9-degree incident angle, The peak reflectivity of Ni-N/Ti-N multilayer mirrors was 36% in almost the same conditions as the reflectivity measurement of the Ni/Ti multilayer.


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