Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition

Xu, Z.; Daga, A.; Chen, Haydn
December 2001
Applied Physics Letters;12/3/2001, Vol. 79 Issue 23, p3782
Academic Journal
Dense, high-index, and reproducible scandium oxide (Sc[sub 2]O[sub 3]) thin films with high mechanical strength were grown on glass substrates by metalorganic chemical-vapor deposition. The influence of deposition temperature on the microstructure evolution and optical properties of Sc[sub 2]O[sub 3] thin films was investigated by x-ray diffraction, scanning electron microscopy, atomic-force microscopy, transmission electron microscopy, and spectrophotometry. A close relationship between microstructure and optical properties was found for Sc[sub 2]O[sub 3] thin films prepared at different deposition temperatures. © 2001 American Institute of Physics.


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