First step towards the growth of single-crystal oxides on Si: Formation of a two-dimensional crystalline silicate on Si(001)

Liang, Y.; Gan, S.; Engelhard, M.
November 2001
Applied Physics Letters;11/26/2001, Vol. 79 Issue 22, p3591
Academic Journal
We have investigated the structural and chemical properties of reconstructed Sr/Si(001) surfaces at different Sr coverages using low energy electron diffraction, x-ray photoelectron spectroscopy, and scanning tunneling microscopy. The results show that upon low temperature oxidation and subsequent UHV annealing of the Sr/Si(001)-(2×1) surface, a crystalline Sr[sub 2]SiO[sub 4] silicate-like layer formed. Using this layer as a template, single-crystal SrO thin films were grown on Si(001) substrates. Our results provide microscopic and spectroscopic evidence of the formation of a uniform, stable, two-dimensional crystalline silicate that can be used for growth of single-crystal oxides on Si(001) substrates. © 2001 American Institute of Physics.


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