Optical temperature measurements on thin freestanding silicon membranes

Schmotz, Markus; Bookjans, Patrick; Scheer, Elke; Leiderer, Paul
November 2010
Review of Scientific Instruments;Nov2010, Vol. 81 Issue 11, p114903
Academic Journal
We report on a contactless, all-optical method to derive thermal properties of 340 nm thin, 640×640 μm2 wide, freestanding silicon membranes. Exploiting the temperature dependent optical transmissivity of 4×10-3/K between 300 and 470 K, we are able to measure the temperature of the membrane with millikelvin thermal, micrometer lateral, and nanosecond temporal resolution. Experiments such as the decay of a transient thermal grating with spacings between 5 and 30 μm, measured in first order of diffraction, as well as heat diffusion in a statically heated membrane are reported in this letter. For the latter case an example of a nanostructured membrane by means of focused ion beam milling is given.


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