Sol–gel preparation of single-layer, 0.75 μm thick lead zirconate titanate films from lead nitrate-titanium and zirconium alkoxide solutions containing polyvinylpyrrolidone

Takenaka, Shinsuke; Kozuka, Hiromitsu
November 2001
Applied Physics Letters;11/19/2001, Vol. 79 Issue 21, p3485
Academic Journal
Lead zirconate titanate (PZT) films were deposited on nesa silica glass substrates by spin coating using a Pb(NO[sub 3])[sub 2]–Zr(OC[sub 3]H[sub 7][sup n])[sub 4]–Ti(OC[sub 3]H[sub 7][sup i])[sub 4] solution containing polyvinylpyrrolidone and acetylacetone. The coating solution had stable viscosity for over 1300 h at room temperature. Single-layer PZT films as thick as 0.75 μm could be obtained via single-step spin coating with successive gel film heat treatments at 80, 300, and 700 °C. The fired films were optically transparent and crack free, exhibiting P–E hysteresis loops with remanent polarization of 24.6±1.6 μC cm[sup -2] and coercive field of 95.6±9.8 kV cm[sup -1]. © 2001 American Institute of Physics.


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