TITLE

Temperature-modulated Si(001):As gas-source molecular beam epitaxy: Growth kinetics and As incorporation

AUTHOR(S)
Kim, H.; Glass, G.; Soares, J. A. N. T.; Foo, Y. L.; Desjardins, P.; Greene, J. E.
PUB. DATE
November 2001
SOURCE
Applied Physics Letters;11/12/2001, Vol. 79 Issue 20, p3263
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Arsenic doping at concentrations C[sub As] ⪆10[sup 18] cm[sup -3] during Si(001) growth from hydride precursors gives rise to strong As surface segregation, low film growth rates R[sub Si], poor electrical activation, and surface roughening. Based upon the results of temperature-programmed desorption studies of Si(001):As surface processes during film deposition, we have investigated the use of temperature-modulated growth including periodic arsenic desorption (10 s at 1000 °C) from the surface segregated layer. Both constant-temperature and temperature-modulated Si(001):As layers were grown at T[sub s]=750 °C, selected as a compromise between maximizing C[sub As] and providing a usable deposition rate, by gas-source molecular beam epitaxy from Si[sub 2]H[sub 6]/AsH[sub 3] mixtures. For constant-temperature growth, R[sub Si] is only 0.08 μm h-1, the fraction of electrically active dopant is 55%, and film surfaces are very rough (rms roughness =110 Å). In sharp contrast, T[sub s]-modulated layers exhibit increases in R[sub Si] by 2.5× to 0.20 μm h-1, 100% electrical activity, and atomically smooth surfaces with =2 Å. The results are explained based upon the competition among As surface segregation, desorption, and incorporation rates. © 2001 American Institute of Physics.
ACCESSION #
5549509

 

Related Articles

  • Thermal transitions of polymers measured by atomic force microscopy. Meincken, M.; Graef, S.; Mueller-Nedebock, K.; Sanderson, R.D. // Applied Physics A: Materials Science & Processing;2002, Vol. 74 Issue 3, p371 

    A new method has been developed to measure thermal transitions by atomic force microscopy in the noncontact mode, using it as a dynamic mechanical analyser on a local scale. In this method the cantilever is oscillating above the polymer surface and the resonance frequency is measured as a...

  • Subsurface mapping of thermal properties with optical heterodyne force microscopy (abstract). Tomoda, M.; Shiraishi, N.; Inagaki, K.; Kolosov, O. V.; Wright, O. B. // Review of Scientific Instruments;Jan2003, Vol. 74 Issue 1, p373 

    Optical heterodyne force microscopy (OHFM) is a novel local probe microscopy that combines an atomic force microscope (AFM) with a periodically modulated laser source.[1] The amplitude and phase of the vibrations of the sample surface induced by the periodic heating can be imaged with OHFM. The...

  • Role of the substrate strain in the sheet resistance stability of NiSi deposited on Si(100). Maillard-Schaller, Eliane; Boyanov, B.I. // Journal of Applied Physics;4/1/1999, Vol. 85 Issue 7, p3614 

    Studies the influence of silicon substrate strain on the thermal stability of the nickel monosilicide (NiSi). Identification of a cross-hatch pattern by atomic force microscopy; Observation on the surface morphology during annealing; Results of the study.

  • Thermal stability of the strained-Si/Si[sub 0.7]Ge[sub 0.3] heterostructure. Sugii, Nobuyuki // Journal of Applied Physics;6/1/2001, Vol. 89 Issue 11, p6459 

    Thermal stability of the strained-Si/Si[sub 0.7]Ge[sub 0.3] heterostructure was investigated by secondary-ion mass spectroscopy, Raman spectroscopy, and atomic force microscopy. Ge atoms diffused out through the strained-Si layer during heat treatment of 1000 °C for 1 h. The activation energy...

  • Direct measurement of spatial modes of a microcantilever from thermal noise. Paolino, Pierdomenico; Tiribilli, Bruno; Bellon, Ludovic // Journal of Applied Physics;Nov2009, Vol. 106 Issue 9, p094313-1 

    Measurements of the deflection induced by thermal noise have been performed on a rectangular atomic force microscope cantilever in air. The detection method, based on polarization interferometry, can achieve a resolution of [formula] in the frequency range 1–800 kHz. The focused beam from...

  • Hindered rolling and friction anisotropy in supported carbon nanotubes. Lucas, Marcel; Xiaohua Zhang; Palaci, Ismael; Klinke, Christian; Tosatti, Erio; Riedo, Elisa // Nature Materials;Nov2009, Vol. 8 Issue 11, p876 

    Carbon nanotubes (CNTs) are well known for their exceptional thermal, mechanical and electrical properties. For many CNT applications it is of the foremost importance to know their frictional properties. However, very little is known about the frictional forces between an individual nanotube and...

  • Misfit-Dislocation Induced Surface Morphology of InGaAs/GaAs Heterostructures. Yastrubchak, Oksana; Wosiński, Tadeusz; Łusakowska, Elżbieta; Figielski, Tadeusz; Tóth, Attila L. // Microchimica Acta;Apr2004, Vol. 145 Issue 1-4, p267 

    The correlation between the surface cross-hatched morphology and the interfacial misfit dislocations in partially relaxed InGaAs/GaAs heterostructures was studied by means of atomic force microscopy and electron-beam induced current mode in a scanning electron microscope. A close correspondence...

  • Low-concentration aqueous solutions of an amphiphilic calix[4]resorcinarene derivative: Self-organization, physicochemical properties, and biological activity under common and hypoelectromagnetic conditions. Ryzhkina, I.; Kiseleva, Yu.; Timosheva, A.; Safiullin, R.; Kadirov, M.; Valitova, Yu.; Konovalov, A. // Doklady Physical Chemistry;Nov2012, Vol. 447 Issue 1, p193 

    The article presents a study which examines the self-organization, physicochemical properties, and biological activity of the aqueous solutions of amphiphilic calix[4]resorcinarene derivative under common and hypoelectromagnetic conditions. The study uses dynamic light scattering (DLS), atomic...

  • Effect of temperature-cycling on the morphology of polymeric thermotropic glazings for overheating protection applications. Weber, Andreas; Resch, Katharina // Journal of Polymer Research;Jun2012, Vol. 19 Issue 6, p1 

    In this paper, the morphology of thermotropic systems with fixed domains (TSFD) was evaluated applying high resolution Atomic Force Microscopy (AFM) also upon heating and cooling. Furthermore nano-mechanical characteristics of the samples were determined by means of Force/Distance spectrometry....

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics