TITLE

Note: Electrical resolution during conductive atomic force microscopy measurements under different environmental conditions and contact forces

AUTHOR(S)
Lanza, M.; Porti, M.; Nafría, M.; Aymerich, X.; Whittaker, E.; Hamilton, B.
PUB. DATE
October 2010
SOURCE
Review of Scientific Instruments;Oct2010, Vol. 81 Issue 10, p106110
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Conductive atomic force microscopy experiments on gate dielectrics in air, nitrogen, and UHV have been compared to evaluate the impact of the environment on topography and electrical measurements. In current images, an increase of the lateral resolution and a reduction of the conductivity were observed in N2 and, especially, in UHV (where current depends also on the contact force). Both effects were related to the reduction/elimination of the water layer between the tip and the sample in N2/UHV. Therefore, since current measurements are very sensitive to environmental conditions, these factors must be taken into consideration when comparisons between several experiments are performed.
ACCESSION #
54858007

 

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