TITLE

Radio frequency-compensated Langmuir probe with auxiliary double probes

AUTHOR(S)
Oh, Se-Jin; Oh, Seung-Ju; Chung, Chin-Wook
PUB. DATE
September 2010
SOURCE
Review of Scientific Instruments;Sep2010, Vol. 81 Issue 9, p093501
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A radio frequency (rf) compensation design using auxiliary double probes connected in parallel with a main measurement probe was developed for Langmuir probe diagnostics. This probe structure can reduce the sheath impedance of the main probe. In our probe design, the sheath capacitance of the probe can be increased and its sheath resistance can be decreased with increasing dc bias differential voltage between the auxiliary double probes. The I-V characteristic curve and electron energy distribution functions measured by our probe system had sufficient rf compensation performance in inductively coupled plasmas.
ACCESSION #
54049808

 

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