TITLE

Mass-density-modulated structures of crystalline hydrogenated carbon films

AUTHOR(S)
Zhang, Z. J.; Narumi, K.; Naramoto, H.
PUB. DATE
October 2001
SOURCE
Applied Physics Letters;10/29/2001, Vol. 79 Issue 18, p2934
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Hydrogenated carbon films with a crystalline structure have been synthesized by radio-frequency plasma-enhanced chemical vapor deposition. The mass density of the films is dependent on the plasma power applied. By switching alternatively two different plasma powers during deposition, mass-density-modulated structures of the crystalline hydrogenated carbon films can be produced. The structure and properties of these mass-density-modulated structures have also been investigated. © 2001 American Institute of Physics.
ACCESSION #
5402554

 

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