Titanium nitride films for ultrasensitive microresonator detectors

Leduc, Henry G.; Bumble, Bruce; Day, Peter K.; Byeong Ho Eom; Jiansong Gao; Golwala, Sunil; Mazin, Benjamin A.; McHugh, Sean; Merrill, Andrew; Moore, David C.; Noroozian, Omid; Turner, Anthony D.; Zmuidzinas, Jonas
September 2010
Applied Physics Letters;9/6/2010, Vol. 97 Issue 10, p102509
Academic Journal
Titanium nitride (TiNx) films are ideal for use in superconducting microresonator detectors for the following reasons: (a) the critical temperature varies with composition (0107) and have noise properties similar to resonators made using other materials, while the quasiparticle lifetimes are reasonably long, 10–200 μs. TiN microresonators should therefore reach sensitivities well below 10-19 W Hz-1/2.


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