Piezoelectric-actuated, piezoresistive-sensed circular micromembranes for label-free biosensing applications

Alava, T.; Mathieu, F.; Rameil, P.; Morel, Y.; Soyer, C.; Remiens, D.; Nicu, L.
August 2010
Applied Physics Letters;8/30/2010, Vol. 97 Issue 9, p093703
Academic Journal
In this paper, we report on the fabrication and characterization of the dynamic behavior of circular micromembranes integrating a piezoelectric thin film for actuation and a boron-doped silicon piezoresistor for sensing purposes. Resonant frequencies corresponding to high-order modes of vibration are measured, respectively, in air and deionized water. The measurements are compared with theoretical values calculated using the extended Lamb’s model [H. Lamb, Proc. R. Soc. London 98, 205 (1920)] adapted to the microscale. Moreover, label-free detection of Bacillus atrophaeus (or B. atrophaeus) with a concentration of 108 spores/mL is repeatedly performed in real-time which assesses the biosensing potential of microscale circular membranes bearing actuation and sensing elements.


Related Articles

  • Measurement of piezoelectric coefficients of ferroelectric thin films. Lefki, K.; Dormans, G. J. M. // Journal of Applied Physics;8/1/1994, Vol. 76 Issue 3, p1764 

    Deals with a study which investigated the measurement of piezoelectric coefficients of lead zirconate titanate (PZT) thin films. Principle basis of micromechanical devices; Processes used in the fabrication of PZT films; Background on the determination of the electrical properties of...

  • In-plane excitation of thin silicon cantilevers using piezoelectric thin films. Leighton, Glenn J. T.; Kirby, Paul B.; Fox, Colin H. J. // Applied Physics Letters;10/29/2007, Vol. 91 Issue 18, p183510 

    This paper deals with the actuation of in-plane and out-of-plane motions of silicon cantilevers, using a single thin film of lead zirconate titanate with a divided electrode configuration. In-plane actuation is demonstrated practically, and excellent agreement is obtained between theoretically...

  • Fabrication and characterization of the piezoelectric microtransformer based on microelectromechanical systems. Seong Kon Kim; Young Ho Seo // Applied Physics Letters;6/26/2006, Vol. 88 Issue 26, p263510 

    In this letter, the design, fabrication, and characterization of a novel piezoelectric microtransformer with bar geometry are presented. The piezoelectric microtransformers were fabricated using PZT thin films and microelectromechanical system technologies. The dimensions of these devices are...

  • Experimental characterization of material structure of piezoelectric PVDF polymer. Ostaševičius, V.; Milašauskaitė, I.; Daukševičius, R.; Baltrušaitis, V.; Grigaliūnas, V.; Prosyčevas, I. // Mechanika;2010, Vol. 86 Issue 6, p78 

    No abstract available.

  • A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor. Junwoo Lee; Wook Choi; Yong Kyoung Yoo; Kyo Seon Hwang; Sang-Myung Lee; Sungchul Kang; Jinseok Kim; Jeong Hoon Lee // Sensors (14248220);2014, Vol. 14 Issue 12, p22199 

    The ability to measure pressure and force is essential in biomedical applications such as minimally invasive surgery (MIS) and palpation for detecting cancer cysts. Here, we report a force sensor for measuring a shear and normal force by combining an arrayed piezoelectric sensors layer with a...

  • Biosensor based on magnetostrictive microcantilever. Suiqiong Li; Orona, Lisa; Zhimin Li; Cheng, Z.-Y. // Applied Physics Letters;2/13/2006, Vol. 88 Issue 7, p073507 

    Magnetostrictive microcantilever (MSMC) as remote biosensor platform is reported. The mass sensitivity of the MSMCs is simulated and compared with the other microcantilevers. MSMCs with a thickness of 30–35 μm and different lengths and widths were fabricated from the magnetostrictive...

  • Design of Piezoelectric PZT Cantilever for Actuator Application. Joshi, Abhay B.; Bodas, Dhananjay; Gangal, S. A. // Sensors & Transducers (1726-5479);Dec2010, Vol. 123 Issue 12, p16 

    Piezoelectric MEMS cantilever is used as a basic element in sensing and actuation. This paper proposes a structural design of MEMS cantilever for actuator application based on bulk MEMS micromachining technique. The structure consists of a silicon dioxide cantilever with an attached...

  • Electromechanical properties of lanthanum-doped lead hafnate titanate thin films for integrated piezoelectric MEMS applications. Kügeler, C.; Böttger, U.; Schneller, T. // Applied Physics A: Materials Science & Processing;Mar2009, Vol. 94 Issue 4, p739 

    This paper focuses on the deposition and electromechanical characterization of lanthanum-doped lead hafnate titanate (PLHT) thin films as key material in piezoelectric microelectromechanical systems (pMEMS). PLHT ( x/30/70) and PLHT( x/45/55) films with a thickness between 150 nm and 250 nm were...

  • {001} Oriented piezoelectric films prepared by chemical solution deposition on Ni foils. Hong Goo Yeo; Trolier-McKinstry, Susan // Journal of Applied Physics;2014, Vol. 116 Issue 1, p014105-1 

    Flexible metal foil substrates are useful in some microelectromechanical systems applications including wearable piezoelectric sensors or energy harvesters based on Pb(Zr,Ti)O3 (PZT) thin films. Full utilization of the potential of piezoelectrics on metal foils requires control of the film...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics