The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges

Donkó, Z.; Schulze, J.; Hartmann, P.; Korolov, I.; Czarnetzki, U.; Schüngel, E.
August 2010
Applied Physics Letters;8/23/2010, Vol. 97 Issue 8, p081501
Academic Journal
Dual-frequency capacitive discharges are used to separately control the mean ion energy, [formula], and flux, Γion, at the electrodes. We study the effect of secondary electrons on this separate control in argon discharges driven at 2+27 MHz at different pressures using Particle in Cell simulations. For secondary yield γ≈0, Γion decreases as a function of the low frequency voltage amplitude due to the frequency coupling, while it increases at high γ due to the effective multiplication of secondary electrons inside the sheaths. Therefore, separate control is strongly limited. [variant_greek_epsilon]ion increases with γ, which might allow an in situ determination of γ-coefficients.


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