The effect of graphite surface condition on the composition of Al2O3 by atomic layer deposition

Pirkle, A.; McDonnell, S.; Lee, B.; Kim, J.; Colombo, L.; Wallace, R. M.
August 2010
Applied Physics Letters;8/23/2010, Vol. 97 Issue 8, p082901
Academic Journal
We present a study of the nucleation of atomic layer deposition of Al2O3 on highly oriented pyrolytic graphite (HOPG) using trimethlyaluminum (TMA) with ozone as the oxidant (TMA/O3). In situ x-ray photoelectron spectroscopy (XPS) is used to study TMA/O3 depositions on HOPG. We examine the dependence of TMA/O3 nucleation on deposition temperature and characterize the morphology and uniformity of deposited films by ex situ atomic force microscopy. The impact of several predeposition surface treatments of the graphite surface condition is discussed, particularly with regard to the presence of adsorbed atmospheric contamination.


Related Articles

  • In situ studies of Al2O3 and HfO2 dielectrics on graphite. Pirkle, Adam; Wallace, Robert M.; Colombo, Luigi // Applied Physics Letters;9/28/2009, Vol. 95 Issue 13, p133106 

    Deposition of Al2O3 and HfO2 dielectrics on graphite is studied as a route to the formation of a high-κ dielectric on graphene. Electron beam evaporation of metal Al and Hf is followed by a separate oxidation step. Reactive e-beam deposition of HfO2 by introduction of O2 to the deposition...

  • Cryogenic graphitization of submicrometer grains embedded in nanostructured tetrahedral amorphous carbon films. Hu, A.; Alkhesho, I.; Duley, W. W.; Zhou, H. // Journal of Applied Physics;10/15/2006, Vol. 100 Issue 8, p084319 

    A growth mechanism for submicrometer grains in diamondlike carbon films has been investigated. Films were formed by laser deposition on quartz substrates at 20–573 K. Atomic force microscopy shows that films deposited at 20–100 K consist of a matrix assembled from 40 nm...

  • Atomic force microscopy and X-ray photoelectron spectroscopy study of chitosan-carbon fiber materials. Nikolenko, Yu. M.; Kuryavyi, V. G.; Sheveleva, I. V.; Zemskova, L. A.; Sergienko, V. I. // Inorganic Materials;Mar2010, Vol. 46 Issue 3, p221 

    Chitosan-carbon materials produced by electrochemical deposition of chitosan on an activated carbon fiber (ACF) as an electrode have been studied by atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). AFM data demonstrate that the microstructure of the coating depends on...

  • A STUDY ON SURFACE CHARACTERIZATION OF ENZYME TREATED POLYETHYLENE TEREPHTHALATE FIBERS BY XPS AND AFM. KARACA, Burcu; ÖZDOĞAN, Esen // Journal of Textile & Apparel / Tekstil ve Konfeksiyon;Jan-Mar2013, Vol. 23 Issue 1, p16 

    Polyesters are widely used in various industrial applications and preferred for their outstanding properties such as high strength, resistance to abrasion, shrinking, wrinkling, most of the chemicals and environmental conditions. However the hydrophobic surface structure due to the lack of polar...

  • Shear Behavior of Glass Fabric/Epoxy Resin Composite Prepared by Surface Treatments. Yaman, Necla; Senol, M. Fikri // AATCC Review;Mar/Apr2012, Vol. 12 Issue 2, p69 

    Unsized glass fabrics were subjected to low temperature plasma or silane coupling to modify the fiber and thus influence the interphase properties of the glass/epoxy system. Orthogonal Array Testing Strategy was used for determining optimal treatment conditions. Tetraethylorthosilicate was...

  • Determination of modified-layer thickness of glow-discharge-treated polytetrafluoroethylene film. Yablokov, M.; Sokolov, I.; Malinovskaya, O.; Gil'man, A.; Kuznetsov, A. // High Energy Chemistry;Jan2013, Vol. 47 Issue 1, p32 

    The article presents a study which experimentally measured the thickness of the modified layer in a dc discharge-treated polytetrafluoroethylene (PTFE) film. A combination of X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) techniques was used to measure the thickness....

  • Novel Approach to Surface Processing for Improving the Efficiency of CdZnTe Detectors. Hossain, A.; Bolotnikov, A.; Camarda, G.; Cui, Y.; Jones, D.; Hall, J.; Kim, K.; Mwathi, J.; Tong, X.; Yang, G.; James, R. // Journal of Electronic Materials;Aug2014, Vol. 43 Issue 8, p2771 

    We emphasize an improvement of the surface processing procedures for cadmium zinc telluride (CZT) detectors, which is one of the principal problems limiting the technology. A rough surface enhances the leakage current into the medium, creating additional trapping centers and thereby degrading...

  • Modification of 4H-SiC and 6H-SiC(0001)Si Surfaces through the Interaction with Atomic Hydrogen and Nitrogen. Losurdo, Maria; Giangregorio, Maria M.; Capezzuto, Pio; Bruno, Giovanni; Brown, April S.; Tong-Ho Kim; Changhyun Yi // Journal of Electronic Materials;Apr2005, Vol. 34 Issue 4, p457 

    The interaction of 4H-SiC(0001)Si and 6H-SiC(0001)Si surfaces with atomic hydrogen and atomic nitrogen produced by remote radio-frequency plasmas is investigated. The kinetics of the surface modifications is monitored in real time using ellipsometry, while chemical modifications of the surface...

  • The influence of nanoscopically thin silver films on bacterial viability and attachment. Ivanova, Elena P.; Hasan, Jafar; Truong, Vi Khanh; Wang, James Y.; Raveggi, Massimo; Fluke, Christopher; Crawford, Russell J. // Applied Microbiology & Biotechnology;Aug2011, Vol. 91 Issue 4, p1149 

    The physicochemical and bactericidal properties of thin silver films have been analysed. Silver films of 3 and 150 nm thicknesses were fabricated using a magnetron sputtering thin-film deposition system. X-ray photoelectron and energy dispersive X-ray spectroscopy and atomic force microscopy...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics