An optical instrument for overall stress and local stress relaxation analysis in thin metal films

Kylner, Carina; Mattsson, Lars
January 1997
Review of Scientific Instruments;Jan1997, Vol. 68 Issue 1, p143
Academic Journal
Describes the design, development, and testing of an optical instrument for simultaneous overall stress and local stress relaxation measurements in thin metal films on substrates. Common reason for stress-induced topographic changes in a metal film; Principle; Optical system layout; Measurement procedure.


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