TITLE

Vertical ramp-actuated inertial micropositioner with a rolling-balls guide

AUTHOR(S)
Yakimov, V.N.
PUB. DATE
January 1997
SOURCE
Review of Scientific Instruments;Jan1997, Vol. 68 Issue 1, p136
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the development and testing of a vertical inertial micropositioner for scanning probe microscopy. Use of a rolling-balls guide for translation of a slider; Resonance frequencies; Design of the micropositioner; Operation.
ACCESSION #
5314696

 

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