Vertical ramp-actuated inertial micropositioner with a rolling-balls guide

Yakimov, V.N.
January 1997
Review of Scientific Instruments;Jan1997, Vol. 68 Issue 1, p136
Academic Journal
Describes the development and testing of a vertical inertial micropositioner for scanning probe microscopy. Use of a rolling-balls guide for translation of a slider; Resonance frequencies; Design of the micropositioner; Operation.


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