TITLE

A combined apparatus of scanning reflection electron microscope and scanning tunneling microscope

AUTHOR(S)
Maruno, S.; Nakahara, H.; Fujita, S.; Watanabe, H.; Kusumi, Y.; Ichikawa, M.
PUB. DATE
January 1997
SOURCE
Review of Scientific Instruments;Jan1997, Vol. 68 Issue 1, p116
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the design and construction of a scanning reflection electron microscope combined with a scanning tunneling microscope (STM) for the purpose of nanoscale structure fabrication under ultrahigh vacuum conditions. Structure of the apparatus; STM images; Surface-sensitive elemental analysis function.
ACCESSION #
5314629

 

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