TITLE

Microscale oscillating crack propagation in silicon nitride thin films

AUTHOR(S)
Kim, Donghyun; Makaram, Prashanth; Thompson, Carl V.
PUB. DATE
August 2010
SOURCE
Applied Physics Letters;8/16/2010, Vol. 97 Issue 7, p071902
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Controlled microscale (<50 μm) wavy cracks in silicon nitride thin films have been produced through a simple heating process. The crack paths were controlled by metal patterns under the silicon nitride thin films. Wavy crack characteristics were investigated by changing the metal, metal linewidths, metal thickness, and silicon nitride thickness. We discuss the differences in the characteristics and mechanisms of propagation of wavy cracks formed due to differential thermal expansion and those that result from thermal gradients.
ACCESSION #
52997982

 

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