TITLE

Femtosecond laser fabrication of high reflectivity micromirrors

AUTHOR(S)
Brodoceanu, D.; Cole, G. D.; Kiesel, N.; Aspelmeyer, M.; Bäuerle, D.
PUB. DATE
July 2010
SOURCE
Applied Physics Letters;7/26/2010, Vol. 97 Issue 4, p041104
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
High-quality freestanding micromirrors consisting of 40 dielectric layers on silicon have been fabricated by ultrashort-pulse laser ablation in combination with laser-assisted wet chemical etching. Backside material removal enables direct access to both faces of the dielectric coating. The amplitude reflectance of the micromirrors has been determined by Fabry–Pérot interferometry; a finesse in excess of 8900±700, corresponding to a reflectivity exceeding 99.95%, has been found. The mechanical quality factor, Q, of the microresonators, measured at 20 K, is determined to be between 5000 and 6000.
ACCESSION #
52616505

 

Related Articles

  • Experimental demonstration of the use of a Fabry–Perot cavity as a mirror of variable reflectivity. Strain, K. A.; Hough, J. // Review of Scientific Instruments;Apr94, Vol. 65 Issue 4, p799 

    The use of a spherical mirror Fabry-Perot cavity as a mirror of variable reflectivity for near monochromatic light is demonstrated herein. The results of an experimental test of two control systems for the variable mirror are presented. It is shown that the reflectivity of our mirror can be...

  • Reflectance modulator based on tandem Fabry-Perot resonators. Fritz, I.J.; Klem, J.F.; Wendt, J.R. // Applied Physics Letters;8/12/1991, Vol. 59 Issue 7, p753 

    Presents calculations and data on a tunable reflector structure of tandem Fabry-Perot resonators. Features of the single epitaxial device; Significance in the production of double-dipped reflectance spectrum; Implication of the modulation depth for the demonstration device.

  • Large nonresonant third-order hyperpolarizabilities of organic charge-transfer complexes. Qihuang Gong; Zongju Xia; Zou, Y.H.; Xiansheng Meng; Lin Wei; Fu-mian Li // Applied Physics Letters;7/22/1991, Vol. 59 Issue 4, p381 

    Examines the measurement of third-order hyperpolarizabilities of large nonresonant solutions of organic charge-transfer complexes in tetrahydrofuran. Values of nonresonant; Estimation of the corresponding values of the third-order susceptibility for the solid state; Structures of the different...

  • Externally deposited phase-compensating dielectric mirrors for asymmetric Fabry-Perot cavity tuning. Karim, Z.; Kyriakakis, C. // Applied Physics Letters;5/30/1994, Vol. 64 Issue 22, p2913 

    Examines externally deposited phase-compensating dielectric mirrors for asymmetric Fabry-Perot cavity tuning. Demonstration of a post-growth ability to fine-tune the location of the Fabry-Perot minima; Composition of the dielectric multilayer mirrors; Exhibition of a pi radian phase difference...

  • Method for accurate growth of vertical-cavity surface-emitting lasers. Chalmers, S.A.; Killeen, K.P. // Applied Physics Letters;3/15/1993, Vol. 62 Issue 11, p1182 

    Proposes a method for measuring the accurate growth of vertical-cavity surface-emitting lasers (VCSEL). Use of a single reflectivity spectrum in determining VCSEL structure; Compensatory mechanism for imprecisions in growth parameters; Use of Fabry-Perot cavity resonance wavelengths.

  • Effect of dispersion on the reflectivity of an asymmetric Fabry--Perot etalon. Hefferman, J.F.; Hegarty, J. // Applied Physics Letters;1/23/1995, Vol. 66 Issue 4, p416 

    Examines the effects of dispersion on the reflectivity spectrum of Fabry--Perot etalon. Complication of the reflectivity spectrum for etalon; Use of transfer matrix approach on reflectivity spectrum; Impact of refractive index on reflectivity spectrum in etalon.

  • Comparison of the calculated transient responses of a Fabry–Perot used in reflection and in transmission. Houssin, M.; Jardino, M.; Desaintfuscien, M. // Review of Scientific Instruments;Nov90, Vol. 61 Issue 11, p3348 

    High finesse optical cavities are used either in reflection or in transmission for the frequency stabilization of lasers. In this paper, we calculate the transient response of the Fabry–Perot cavity after a small frequency jump of the laser in both cases. We compare the static gains and...

  • Spectral interference effects in the light emission from Fabry–Perot cavities. Lei, C.; Huang, Z.; Deppe, D. G.; Pinzone, C. J.; Dupuis, R. D. // Journal of Applied Physics;3/15/1993, Vol. 73 Issue 6, p2700 

    Presents a study on the emission characteristics from a Fabry-Perot cavity containing dipoles that are localized at a distance λ/4 away from one of the cavity reflectors, where &lambda is the emission wavelength. Model of a single spontaneous emission event; Comparison of measurements with...

  • Wavelength dependence of the indices of refraction of molecular beam epitaxy-grown ZnMgSe and... Peiris, F.C.; Lee, S. // Journal of Applied Physics;7/15/1999, Vol. 86 Issue 2, p918 

    Investigates the dispersion relations of n for zinc (Zn) magnesium (Mg) selenium (Se) and Zn-cadmium-Se semiconductor alloys below their respective band gaps. Measurements using prism coupler and the reflectivity method; Analysis of Fabry-Perot oscillations of the reflectivity spectra; Conclusion.

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics