Modified distributed electron cyclotron resonance ion source for the production of large diameter ion beams

Wartski, L.; Coste, Ph.; Fusellier, C.; Schwebel, C.; Aubert, J.
October 2001
Review of Scientific Instruments;Oct2001, Vol. 72 Issue 10, p3816
Academic Journal
The work presented in this article concerns the conception and the study of a multiantenna electron cyclotron resonance (ECR) ion source at 2.45 GHz dedicated to the surface treatment of large area materials. In this original device, a microwave plasma is created in a 20 cm in diameter ionization chamber. The 15 cm in diameter extracted ion beam has a current density of about 1 mA/cm[sup 2]. The applicator is an N-way coaxial power divider in which the N=20 antennas are individually magnetized by internal SmCo bars in order to produce ECR zones in their vicinity. Moreover, the microwave plasma is confined by a multicusp magnetic structure surrounding the ionization chamber. The choice of the source geometry has been guided by the study of some theoretical considerations such as the characteristic diffusion length, the minimum breakdown field, and the penetration depth of the wave into the plasma. Simulations both of the electromagnetic field and the static magnetic field distribution have been carried out in order to validate the final choice of the source geometry. A full characterization of the ECR plasma and of the extracted ion beam was made with different experimental techniques. These results allow us to localize the plasma creation zones inside the ionization chamber. A 120 mA singly charged argon ion beam with a profile homogeneity better than ±5% over 10 cm was obtained 5 cm downstream the extraction system with a 300 W microwave power and a neutral argon pressure of 10[sup -3] mbar in the ionizing chamber. © 2001 American Institute of Physics.


Related Articles

  • Design of an advanced minimum B for electron cyclotron resonance multicharged ion sources. Ishii, S.; Kato, Y. // Review of Scientific Instruments;May93, Vol. 64 Issue 5, p1131 

    An advanced configuration of minimum-B field is designed for the electron cyclotron resonance (ECR) multicharged ion sources. The aim is to dramatically increase the efficiency of ion beam extraction by correcting the deformed magnetic flux tube containing hot plasma. The correction is performed...

  • Production of low energy, high intensity metal ion beams by means of a laser ion source. Gammino, S.; Torrisi, L.; Ando`, L.; Ciavola, G.; Celona, L.; La´ska, L.; Krasa, J.; Pfeifer, M.; Rohlena, K.; Woryna, E.; Wolowski, J.; Parys, P.; Shirkov, G. D. // Review of Scientific Instruments;Feb2002, Vol. 73 Issue 2, p650 

    The ECLISSE (ECR coupled to Laser Ion Source for charge State Enhancement) project started in 1999 with the aim to obtain an intense beam of highly charged ions (pulsed mode) by means of the coupling between a laser ion source (LIS) and an electron cyclotron resonance (ECR) ion source. The major...

  • A new ECR ion source for atomic physics research at Institute of Modern Physics. Zhang, Z. M.; Zhao, H. W.; Zhang, X. Z.; Guo, X. H.; Li, X. X.; Sun, L. T.; Cao, Y.; Feng, Y. C.; Li, J. Y.; Lei, H. L.; Wang, H.; Gao, J. Y.; Ma, B. H. // Review of Scientific Instruments;Feb2002, Vol. 73 Issue 2, p580 

    A new electron cyclotron resonance (ECR) ion source (LECR3—Lanzhou Electron Cyclotron Resonance Ion Source No. 3) has been constructed this year. The main purpose of this source is to provide highly charged ion beams for atomic physics and surface physics research. The design of this ion...

  • Ion source studies at the ORNL ECR source facility. Meyer, F. W.; Hale, J. W. // Review of Scientific Instruments;Jan1990, Vol. 61 Issue 1, p324 

    Using high resolution magnetic analysis, we have measured energy spreads of Ar[sup + q] (1 < q < 12) ion beams extracted from the ORNL ECR ion source under a number of different ECR plasma conditions. The measured energy spreads for the different charge states fall in the range 8-20 eV per...

  • Experimental study of the beam divergence from a broad-beam electron cyclotron resonance ion source. Ghanbari, E.; Nguyen, T.; Lindstrom, R. // Review of Scientific Instruments;Jan1990, Vol. 61 Issue 1, p291 

    Various factors affecting divergence of an ion beam extracted from a broad-beam electron cyclotron resonance ion source are studied. The source has three graphite grid extraction optics providing an 18-cm ion beam. A simple apparatus and method is used to investigate the beam divergence as a...

  • Single-stage electron cyclotron resonance ion source for efficient low-charge-state production. Decrock, P.; Van Duppen, P.; Baeten, F.; Dom, C.; Jongen, Y. // Review of Scientific Instruments;Jan1990, Vol. 61 Issue 1, p279 

    A single-stage electron cyclotron resonance source was developed for the Radioactive Ion Beam project. The layout of the source and results obtained with an off-line test separator are presented. Maximum ionization efficiencies obtained for Ne[sup +1], Ne[sup +2], and Ne[sup +3] using He as...

  • Observations of the frequency tuning effect in the 14 GHz CAPRICE ion source. Celona, L.; Ciavola, G.; Consoli, F.; Gammino, S.; Maimone, F.; Mascali, D.; Spädtke, P.; Tinschert, K.; Lang, R.; Mäder, J.; Roßbach, J.; Barbarino, S.; Catalano, R. S. // Review of Scientific Instruments;Feb2008, Vol. 79 Issue 2, p023305 

    A set of measurements with the CAPRICE ion source at the GSI test bench has been carried out to investigate its behavior in terms of intensity and shape of the extracted beam when the microwaves generating the plasma sweep in a narrow range of frequency (±40 MHz) around the klystron center...

  • Ion source development at KVI. Beijers, J. P. M.; Kremers, H. R.; Mironov, V.; Mulder, J.; Saminathan, S.; Brandenburg, S. // Review of Scientific Instruments;Feb2008, Vol. 79 Issue 2, p02A320 

    Ion source development at KVI is focused on increasing the beam intensity from the electron cyclotron resonance ion source injector and optimizing the beam transport and injection into the superconducting AGOR cyclotron. We describe several modifications that have resulted in a significant...

  • Production of highly charged ion beams with SECRAL. Sun, L. T.; Zhao, H. W.; Lu, W.; Zhang, X. Z.; Feng, Y. C.; Li, J. Y.; Cao, Y.; Guo, X. H.; Ma, H. Y.; Zhao, H. Y.; Shang, Y.; Ma, B. H.; Wang, H.; Li, X. X.; Jin, T.; Xie, D. Z. // Review of Scientific Instruments;Feb2010, Vol. 81 Issue 2, p02A318 

    Superconducting electron cyclotron resonance ion source with advanced design in Lanzhou (SECRAL) is an all-superconducting-magnet electron cyclotron resonance ion source (ECRIS) for the production of intense highly charged ion beams to meet the requirements of the Heavy Ion Research Facility in...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics