TITLE

Modified distributed electron cyclotron resonance ion source for the production of large diameter ion beams

AUTHOR(S)
Wartski, L.; Coste, Ph.; Fusellier, C.; Schwebel, C.; Aubert, J.
PUB. DATE
October 2001
SOURCE
Review of Scientific Instruments;Oct2001, Vol. 72 Issue 10, p3816
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The work presented in this article concerns the conception and the study of a multiantenna electron cyclotron resonance (ECR) ion source at 2.45 GHz dedicated to the surface treatment of large area materials. In this original device, a microwave plasma is created in a 20 cm in diameter ionization chamber. The 15 cm in diameter extracted ion beam has a current density of about 1 mA/cm[sup 2]. The applicator is an N-way coaxial power divider in which the N=20 antennas are individually magnetized by internal SmCo bars in order to produce ECR zones in their vicinity. Moreover, the microwave plasma is confined by a multicusp magnetic structure surrounding the ionization chamber. The choice of the source geometry has been guided by the study of some theoretical considerations such as the characteristic diffusion length, the minimum breakdown field, and the penetration depth of the wave into the plasma. Simulations both of the electromagnetic field and the static magnetic field distribution have been carried out in order to validate the final choice of the source geometry. A full characterization of the ECR plasma and of the extracted ion beam was made with different experimental techniques. These results allow us to localize the plasma creation zones inside the ionization chamber. A 120 mA singly charged argon ion beam with a profile homogeneity better than ±5% over 10 cm was obtained 5 cm downstream the extraction system with a 300 W microwave power and a neutral argon pressure of 10[sup -3] mbar in the ionizing chamber. © 2001 American Institute of Physics.
ACCESSION #
5234584

 

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