Blowing of polycrystalline silicon fuses

Lee, W. T.; Fowler, A. C.; Power, O.; Healy, S.; Browne, J.
July 2010
Applied Physics Letters;7/12/2010, Vol. 97 Issue 2, p023502
Academic Journal
Polycrystalline silicon fuses are one time programmable memory elements which allow the calibration of integrated circuits at wafer and package level. We present a zero-dimensional lumped parameter model of the programming of fuses made from a combination of tungsten silicide and polycrystalline silicon. The components of the model are an electrical model, a thermal model, and a flow model. The model generates quantitatively accurate results and reproduces trends with applied voltage and fuse size.


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