TITLE

Blowing of polycrystalline silicon fuses

AUTHOR(S)
Lee, W. T.; Fowler, A. C.; Power, O.; Healy, S.; Browne, J.
PUB. DATE
July 2010
SOURCE
Applied Physics Letters;7/12/2010, Vol. 97 Issue 2, p023502
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Polycrystalline silicon fuses are one time programmable memory elements which allow the calibration of integrated circuits at wafer and package level. We present a zero-dimensional lumped parameter model of the programming of fuses made from a combination of tungsten silicide and polycrystalline silicon. The components of the model are an electrical model, a thermal model, and a flow model. The model generates quantitatively accurate results and reproduces trends with applied voltage and fuse size.
ACCESSION #
52289453

 

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