Removal of floating dust in glow discharge using plasma jet

Ticoş, C. M.; Jepu, I.; Lungu, C. P.; Chiru, P.; Zaroschi, V.; Lungu, A. M.
July 2010
Applied Physics Letters;7/5/2010, Vol. 97 Issue 1, p011501
Academic Journal
Dust can be an inconvenient source of impurities in plasma processing reactors and in many cases it can cause damage to the plasma-treated surfaces. A technique for dust expulsion out of the trapping region in plasma is presented here, based on the wind force exerted on dust particles by a pulsed plasma jet. Its applicability is demonstrated by removing floating dust in the sheath of parallel-plate capacitive radio-frequency plasma.


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