TITLE

Removal of floating dust in glow discharge using plasma jet

AUTHOR(S)
Ticoş, C. M.; Jepu, I.; Lungu, C. P.; Chiru, P.; Zaroschi, V.; Lungu, A. M.
PUB. DATE
July 2010
SOURCE
Applied Physics Letters;7/5/2010, Vol. 97 Issue 1, p011501
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Dust can be an inconvenient source of impurities in plasma processing reactors and in many cases it can cause damage to the plasma-treated surfaces. A technique for dust expulsion out of the trapping region in plasma is presented here, based on the wind force exerted on dust particles by a pulsed plasma jet. Its applicability is demonstrated by removing floating dust in the sheath of parallel-plate capacitive radio-frequency plasma.
ACCESSION #
52060204

 

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