High force sensitivity in Q-controlled phase-modulation atomic force microscopy

Kobayashi, Naritaka; Yan Jun Li; Naitoh, Yoshitaka; Kageshima, Masami; Sugawara, Yasuhiro
July 2010
Applied Physics Letters;7/5/2010, Vol. 97 Issue 1, p011906
Academic Journal
We investigate the dependence of effective Q-factor on force sensitivity in Q-controlled phase-modulation atomic force microscopy. With Q-control, the phase noise density spectrum shows a characteristic dependence on modulation frequency (fm). The phase noise density spectrum is nearly constant in the low-fm region, whereas it decreases inverse-proportionally to fm in the high-fm region. Such a decrease enhances the force sensitivity. We demonstrate that force sensitivity can be markedly increased with Q-control to exceed the limit of force sensitivity without Q-control.


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