Heating dynamics and extreme ultraviolet radiation emission of laser-produced Sn plasmas

Yuspeh, S.; Sequoia, K. L.; Tao, Y.; Tillack, M. S.; Burdt, R. A.; Najmabadi, F.
June 2010
Applied Physics Letters;6/28/2010, Vol. 96 Issue 26, p261501
Academic Journal
The impact of 1.064 μm laser absorption depth on the heating and in-band (2% bandwidth) 13.5 nm extreme ultraviolet emissions in Sn plasmas is investigated experimentally and numerically. In-band emission lasting longer than the laser pulse and separation between the laser absorption and in-band emission region are observed. Maximum efficiency is achieved by additional heating of the core of the plasma to allow the optimal temperature to expand to a lower and more optically thin density. This leads to higher temperature plasma that emits less in-band light as compared to CO2 produced plasma sources for the same application.


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