TITLE

Direct-search deep level photothermal spectroscopy: An enhanced reliability method for overlapped semiconductor defect state characterization

AUTHOR(S)
Jun Xia; Mandelis, Andreas
PUB. DATE
June 2010
SOURCE
Applied Physics Letters;6/28/2010, Vol. 96 Issue 26, p262112
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A method for resolving highly overlapped defects in rate-window analysis is proposed. This method offers high defect-state characterization reliability because it is based on direct multiparameter fitting of deep level photothermal spectra using combined temperature and frequency scans. Two direct search optimization algorithms are utilized as follows: the genetic algorithm for a search of possible solution areas and the pattern search algorithm for a refined search of global minimum. Four defect levels are identified using this technique.
ACCESSION #
51975685

 

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