Independently addressable subarrays of silicon microdischarge devices: Electrical characteristics of large (30×30) arrays and excitation of a phosphor

Park, S.-J.; Eden, J. G.; Chen, J.; Liu, C.
September 2001
Applied Physics Letters;9/24/2001, Vol. 79 Issue 13
Academic Journal
Large arrays (up to 30×30) of microdischarge devices having separately addressable subarrays have been fabricated in Si and operated continuously in Ne, Ne/Ar, and Ne/Xe gas mixtures at pressures up to 800 Torr. Eight 3×3 arrays fabricated on the same substrate operate simultaneously at voltages as low as 210 V in 400 Torr of Ne and exhibit lifetimes beyond 19 h, or approximately 1 order of magnitude larger than those for earlier arrays in which all devices have a common anode. Four 15×15 arrays have also been tested and, when operated in Ne/Ar or Ne/10% Xe gas mixtures, generate intense fluorescence in the green from a phosphor over an area of 16 mm[sup 2]. © 2001 American Institute of Physics.


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