Note: A low leakage liquid seal for micromachined gas valves

Evans, Allan T.; Gianchandani, Yogesh B.
June 2010
Review of Scientific Instruments;Jun2010, Vol. 81 Issue 6, p066105
Academic Journal
We report a method for addressing gas leakage in micromachined valves. The valves used for evaluating the proposed concept utilize a silicon valve seat that is bonded to a glass substrate and actuated by a piezoelectric stack, all of which are assembled within a ceramic package. The sealing method uses the capillary forces of a liquid sealant on the valve seat to reduce gas leakage below measurable limits. The gas leak rates are compared in valves with and without the seal enhancement. For example, a valve closes against 13.5 kPa with 10 V actuation, compared to 40 V required without the enhancement. Leakage is also evaluated for liquid flow.


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