TITLE

On chip, high-sensitivity thermal sensor based on high-Q polydimethylsiloxane-coated microresonator

AUTHOR(S)
Bei-Bei Li; Qing-Yan Wang; Yun-Feng Xiao; Xue-Feng Jiang; Yan Li; Xiao, Lixin; Gong, Qihuang
PUB. DATE
June 2010
SOURCE
Applied Physics Letters;6/21/2010, Vol. 96 Issue 25, p251109
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A high-sensitivity thermal sensing is demonstrated by coating a layer of polydimethylsiloxane (PDMS) on the surface of a silica toroidal microresonator on a silicon wafer. Possessing high-Q whispering gallery modes (WGMs), the PDMS-coated microresonator is highly sensitive to the temperature change in the surroundings. We find that, when the PDMS layer becomes thicker, the WGM experiences a transition from redshift to blueshift with temperature increasing due to the negative thermal-optic coefficient of PDMS. The measured sensitivity (0.151 nm/K) is one order of magnitude higher than pure silica microcavity sensors. The ultrahigh resolution of the thermal sensor is also analyzed to reach 10-4 K.
ACCESSION #
51709474

 

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