TITLE

Electrode oxygen-affinity influence on voltage nonlinearities in high-k metal-insulator-metal capacitors

AUTHOR(S)
Vallée, C.; Gonon, P.; Jorel, C.; El Kamel, F.
PUB. DATE
June 2010
SOURCE
Applied Physics Letters;6/7/2010, Vol. 96 Issue 23, p233504
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
This work highlights the influence of the oxygen affinity of the metal electrodes used in high-k metal-insulator-metal capacitors. Several metallic electrodes are tested in order to investigate the role of the metal work function, and the role of the electrode oxygen-affinity in nonlinear behavior of HfO2 and BaTiO3 capacitors. It is shown that the magnitude of the quadratic coefficient of nonlinearity is better explained by the electrode oxygen-affinity rather than by its work function. It is thought that electrode oxidation increases the number of oxygen vacancies at the electrode/dielectric interface, and so increases the magnitude of nonlinearity.
ACCESSION #
51378983

 

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