The functionalization of graphene using electron-beam generated plasmas

Baraket, M.; Walton, S. G.; Lock, E. H.; Robinson, J. T.; Perkins, F. K.
June 2010
Applied Physics Letters;6/7/2010, Vol. 96 Issue 23, p231501
Academic Journal
A plasmas-based, reversible functionalization of graphene is discussed. Using electron-beam produced plasmas, oxygen and fluorine functionalities have been added by changing the processing gas mixtures from Ar/O2 to Ar/SF6, respectively. The reversibility of the functionalization was investigated by annealing the samples. The chemical composition and structural changes were studied by x-ray photoelectron spectroscopy and Raman spectroscopy.


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