TITLE

Three-dimensional imaging of pore structures inside low-κ dielectrics

AUTHOR(S)
Xin, Huolin L.; Ercius, Peter; Hughes, Kevin J.; Engstrom, James R.; Muller, David A.
PUB. DATE
May 2010
SOURCE
Applied Physics Letters;5/31/2010, Vol. 96 Issue 22, p223108
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The three-dimensional reconstruction of a porous low-dielectric constant film (κ=2.5), resolving pores as small as 1 nm, was achieved using annular dark-field scanning transmission electron tomography, enabling quantitative measurements of the pore morphologies and size distribution. Most large pores were elliptical. Together with log-normal pore-size distribution, this suggests pore coalescence during the material’s growth. Ellipsometric porosimetry indicates a high degree of interconnectivity between pores. Tomography shows the material exhibits little large-scale pore connectivity, thus placing an upper limit on the size of the interconnections at below 1 nm. Systematic errors in the tomographic and ellipsometric size distributions appear to be largely complementary.
ACCESSION #
51227033

 

Related Articles

  • One-shot structure determination. Doerr, Allison // Nature Methods;Feb2010, Vol. 7 Issue 2, p96 

    The article reports on a study by Jianwei Miao of the University of California, according to which a new concept called ankylography can be used to record the diffraction pattern of the three dimensional (3D) structure of single particles. It states that a coherent X-ray beam is fired at the...

  • 8. HV INSULATED CABLES.  // Electrical Markets of Japan;2003, p21 

    Presents charts and tables about the high voltage (HV) insulated cables market in Japan in 2000. Composition of the HV insulated cables market; Imports and exports of HV insulated cables by country; Forecast of HV insulated cables market from 2000 to 2010.

  • 9. INSTALLATION CABLE > 80 V < 1 kV.  // Electrical Markets of Japan;2003, p23 

    Presents charts and tables about the installation cable market in Japan in 2000. Composition of the installation cable market; Imports and exports of installation cable by country; Forecast of installation cable market from 2000 to 2010.

  • 13. INSULATORS AND FITTINGS.  // Electrical Markets of South Korea;2003, p28 

    Presents charts and tables about the insulators and fittings market in South Korea in 2000. Composition of the insulators and fittings market; Imports and exports of insulators and fittings by country; Forecast of insulators and fittings market from 2000 to 2010.

  • Superconductivity in Topological Insulator Sb2Te3 Induced by Pressure. J. Zhu; J. L. Zhang; P. P. Kong; S. J. Zhang; X. H. Yu; J. L. Zhu; Q. Q. Liu; X. Li; R. C. Yu; Ahuja, R.; W.G. Yang; G. Y. Shen; H. K.Mao; H.M. Weng; X. Dai; Z. Fang; Y. S. Zhao; C.Q. Jin // Scientific Reports;6/21/2013, p1 

    Topological superconductivity is one of most fascinating properties of topological quantum matters that was theoretically proposed and can support Majorana Fermions at the edge state. Superconductivity was previously realized in a Cu-intercalated Bi2Se3 topological compound or a Bi2Te3...

  • 11. UNINSULATED LINES.  // Electrical Markets of Brazil;2003, p27 

    Presents charts and tables about the uninsulated lines market in Brazil in 2000. Composition of the uninsulated lines market; Imports and exports of uninsulated lines by country; Forecast of unsinsulated lines market from 2000 to 2010.

  • 13. INSULATORS AND FITTINGS.  // Electrical Markets of Brazil;2003, p31 

    Presents charts and tables about the insulators and fittings market in Brazil in 2000. Composition of the insulators and fittings market; Imports and exports of insulators and fittings by country; Forecast of insulators and fittings market from 2000 to 2010.

  • 8. HV INSULATED CABLES.  // Electrical Markets of Spain;2003, p19 

    Presents data on high voltage (HV) insulated cables market in Spain as of October 2003. Composition of the insulated cables market; Average foreign trade of HV insulated cables by country in three years; Forecast on HV insulated cables market from 2000 to 2010.

  • 8. HV INSULATED CABLES.  // Electrical Markets of South Korea;2003, p18 

    Presents charts and tables about the high voltage (HV) insulated cables market in South Korea in 2000. Composition of the HV insulated cables market; Imports and exports of HV insulated cables country; Forecast of HV insulated cables market from 2000 to 2010.

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics