TITLE

Electron temperature analysis of two-gas-species inductively coupled plasma

AUTHOR(S)
Bai, K. H.; Chang, H. Y.; Uhm, H. S.
PUB. DATE
September 2001
SOURCE
Applied Physics Letters;9/10/2001, Vol. 79 Issue 11
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The electron energy distribution functions and electron temperatures are measured in Ar/He and Ar/Xe inductively coupled plasma with various mixing ratios. The electron temperature does not change linearly with the mixing ratios; instead it increases abruptly near P[sub He]/P[sub Ar+He]=1 and decreases rapidly near P[sub Xe]/P[sub Ar+Xe]=0. A simple model using a two-ion-species fluid model is suggested to explain the electron temperature variations, and it agrees well with the experimental results. © 2001 American Institute of Physics.
ACCESSION #
5113229

 

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