Electrochemical machining of stainless steel microelements with ultrashort voltage pulses

Kirchner, Viola; Cagnon, Laurent; Schuster, Rolf; Ertl, Gerhard
September 2001
Applied Physics Letters;9/10/2001, Vol. 79 Issue 11
Academic Journal
An electrochemical pulse technique enables the fabrication of three-dimensional microelements from stainless steel. The method is based on the application of ultrashort (nanosecond) voltage pulses, whereupon electrochemical reactions are locally confined with submicrometer precision. Employing properly shaped tool electrodes enables the machining of freestanding cantilevers or microstructures directly to a metal sheet. Due to gentle removal of the material, the grain structure of the material is revealed without any chemical or mechanical modifications. This is demonstrated by measuring the vibration frequency of a cantilever, and agrees well with the value derived from the bulk material properties. © 2001 American Institute of Physics.


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