Laser ablation of solid substrates in a water-confined environment

Zhu, S.; Lu, Y. F.; Hong, M. H.
August 2001
Applied Physics Letters;8/27/2001, Vol. 79 Issue 9, p1396
Academic Journal
Laser ablation of Si under a water surface has been investigated. The laser used is a KrF excimer laser, which has a wavelength of 248 nm and a pulse duration of 23 ns. It is found that the laser ablation rate of Si varies with the thickness of the water layer above the Si substrates. The laser ablation rate is the most highly enhanced with a water layer of 1.1 mm. It is assumed that the plasma generated in the water confinement regime with an optimal water layer thickness induces the strongest pressure. This high-pressure, high-temperature plasma results in the highest ablation rate. A wide-band microphone is used to detect the audible acoustic wave generated during the laser ablation. The amplitude of the acoustic wave is closely related to the ablation rate. It is found that the first peak-to-peak amplitude of the acoustic wave is the strongest when the water layer thickness is 1.1 mm above the substrate. Fast Fourier transform analysis of the wave forms shows that there are several frequency components included in the acoustic waves. The dominant frequency component decreases from 10.6 to 3.5 kHz as the water layer thickness varies from 1 to 2.2 mm. Diagnostics of the acoustic wave emission can be used to find the optimal water layer thickness to enhance the laser ablation rate. With proper calibration, acoustic-wave detection can be used as a real-time monitoring of the laser ablation. © 2001 American Institute of Physics.


Related Articles

  • Properties of laser ablated porous silicon. Savin, D. P.; Roizin, Ya. O.; Demchenko, D. A.; Mugen´ski, E.; Soko´lska, I. // Applied Physics Letters;11/11/1996, Vol. 69 Issue 20, p3048 

    Luminescent films of porous silicon were obtained by laser ablation of crystalline silicon. The spectral and temporal characteristics of light emission from laser ablated porous silicon (LAPS) films critically depend on the chemical composition of the atmosphere in which they were fabricated....

  • Silicon nanowires prepared by laser ablation at high temperature. Zhang, Y. F.; Tang, Y. H.; Wang, N.; Yu, D. P.; Lee, C. S.; Bello, I.; Lee, S. T. // Applied Physics Letters;4/13/1998, Vol. 72 Issue 15 

    Silicon nanowires have been synthesized in high yield and high purity by using a high-temperature laser-ablation method with growth rates ranging from 10 to 80 μm/h. Transmission electron microscopic investigation shows that the nanowires are crystalline Si, and have diameters ranging from 3...

  • In situ ellipsometric characterization of SiNx films grown by laser ablation. Samano, E.C.; Machorro, R. // Journal of Applied Physics;11/1/1998, Vol. 84 Issue 9, p5296 

    Examines the synthesis of the uniform and smooth silicon nitride films through the use of the laser ablation of a Si3N4 sintered target. Monitoring of the evolution of the composition and thickness control of SiNx overlayers grown on single-crystal silicon (Si) and quartz substrates; Reference...

  • The optically active center and its activation process in Er-doped Si thin film produced by laser... Ishii, Masashi; Komuro, Shuji // Journal of Applied Physics;4/15/1999 Part 1 of 2, Vol. 85 Issue 8, p4024 

    Presents information on a study which investigated the local structure of erbium-doped silicon produced by the laser ablation technique. Experiments and local structure analysis; Results and discussion; Conclusion.

  • Epitaxial growth of YBa2Cu3O7-δ films on oxidized silicon with yttria- and zirconia-based buffer layers. Pechen, E. V.; Schoenberger, R.; Brunner, B.; Ritzinger, S.; Renk, K. F.; Sidorov, M. V.; Oktyabrsky, S. R. // Journal of Applied Physics;9/1/1993, Vol. 74 Issue 5, p3614 

    Presents a study of the epitaxial growth of YBa[sub 2]Cu[sub 3]O[sub 7-δ] (YBCO) on oxidized silicon with yttria- and zirconia-based buffer layers. Preparation of YBCO films in silicon; Use of laser ablation technique to preapare the buffer layers and the YBCO films; Methods on depositing...

  • Enhanced oxidation of silicon using a collimated hyperthermal ozone beam. Nishiguchi, T.; Morikawa, Y.; Miyamoto, M.; Nonaka, H.; Ichimura, S. // Applied Physics Letters;7/16/2001, Vol. 79 Issue 3 

    Silicon was oxidized by a collimated hyperthermal ozone beam produced by pulsed-laser ablation of solid ozone to increase the controllability of the silicon dioxide film thickness and to achieve low-temperature oxidation. The oxidation rate could be accurately controlled by the number of laser...

  • Coulomb explosion in femtosecond laser ablation of Si(111). Roeterdink, W. G.; Juurlink, L. B. F.; Vaughan, O. P. H.; Dura Diez, J.; Bonn, M.; Kleyn, A. W. // Applied Physics Letters;6/9/2003, Vol. 82 Issue 23, p4190 

    The ablation of ionized silicon is studied using near-infrared femtosecond laser pulses in the fluence regime from 1 to 9 J/cm[SUP2]. Two major peaks are observed in the mass spectrum corresponding to Si[SUP+] and Si[SUP2+]. In the time-of-flight transients of Si[SUP+], a bimodal structure is...

  • Removal versus ablation in KrF dry laser cleaning of polystyrene particles from silicon. Kudryashov, Sergey I.; Allen, Susan D. // Journal of Applied Physics;11/1/2002, Vol. 92 Issue 9, p5159 

    Direct absorption and melting of 0.2, 0.5 and 1.1 μm polystyrene particles on a Si substrate irradiated by 248 nm excimer laser radiation was found to contribute to their dry laser removal via a "hopping" mechanism at cleaning thresholds of 0.05, 0.1, and 0.16 J/cm[SUP2], respectively....

  • Plasma and ablation dynamics in ultrafast laser processing of crystalline silicon. Choi, Tae Y.; Grigoropoulos, Costas P. // Journal of Applied Physics;11/1/2002, Vol. 92 Issue 9, p4918 

    Mechanisms of ultrafast (femtosecond) laser-induced ablation on crystalline silicon are investigated by time-resolved pump-and-probe microscopy in normal imaging and shadowgraph arrangements. A one-dimensional model of the energy transport is utilized to predict the carrier temperature and...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics