Dielectric charging characterization on microelectromechanical switches by discharge current transient

Molinero, David; Castaner, Luis
May 2010
Applied Physics Letters;5/3/2010, Vol. 96 Issue 18, p183503
Academic Journal
The discharge current method is used to quantify the dielectric reliability of microelectromechanical switches. Two dielectrics, silicon oxide and silicon nitride, were used to extract the charge trapped, the emissivity and the dielectric relaxation time by means of a circuital model with a current source simulating the charge trap. A figure of merit is proposed to better quantify the dielectric reliability issues.


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