TITLE

Dielectric charging characterization on microelectromechanical switches by discharge current transient

AUTHOR(S)
Molinero, David; Castaner, Luis
PUB. DATE
May 2010
SOURCE
Applied Physics Letters;5/3/2010, Vol. 96 Issue 18, p183503
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The discharge current method is used to quantify the dielectric reliability of microelectromechanical switches. Two dielectrics, silicon oxide and silicon nitride, were used to extract the charge trapped, the emissivity and the dielectric relaxation time by means of a circuital model with a current source simulating the charge trap. A figure of merit is proposed to better quantify the dielectric reliability issues.
ACCESSION #
50309173

 

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