TITLE

Measurement of the total energy losses per electron-ion lost in various mixed gas inductively coupled plasmas

AUTHOR(S)
Ju-Hwan Ku; Young-Kwang Lee; Chin-Wook Chung
PUB. DATE
April 2010
SOURCE
Physics of Plasmas;Apr2010, Vol. 17 Issue 4, p043508
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The total energy loss per electron-ion lost was measured at various gases and mixtures (Ar, He, N2, O2, Ar/N2, Ar/O2, He/N2, and He/O2) in the pressure range of 5–50 mTorr in an inductively coupled plasma. To measure electron temperatures and ion fluxes at a chamber wall, the floating harmonics method was used. The absorbed power was determined by measuring antenna resistances and currents. The total energy losses were obtained from the power balance equation of a global model. In the case of Ar mixture plasma with molecular gas, the total energy loss decreased with fractional Ar flow rate. He mixture plasma decreased more than the decrease in total energy loss of Ar mixture plasma. These experimental results were compared and were consistent with average collisional energy loss.
ACCESSION #
50174245

 

Related Articles

  • Fluctuation measurements using a five-pin triple probe in the Joint European Torus boundary plasma. Silva, C.; Gonçalves, B.; Hidalgo, C.; Pedrosa, M. A.; Erents, K.; Matthews, G.; Pitts, R. A. // Review of Scientific Instruments;Oct2004 Part I & II, Vol. 75 Issue 10, p4314 

    A multi-probe system has been developed to investigate the importance of electron temperature fluctuations turbulent transport in the Joint European Torus boundary plasma. The compact five-pin triple probe has been designed to reduce the phase delay of fluctuations due to the finite pin...

  • Electron-wall interaction in Hall thrusters. Raitses, Y.; Staack, D.; Keidar, M.; Fisch, N. J. // Physics of Plasmas;May2005, Vol. 12 Issue 5, p057104 

    Electron-wall interaction effects in Hall thrusters are studied through measurements of the plasma response to variations of the thruster channel width and the discharge voltage. The discharge voltage threshold is shown to separate two thruster regimes. Below this threshold, the electron energy...

  • The scaling of forced collisionless reconnection. Sullivan, Brian P.; Rogers, Barrett N. // Physics of Plasmas;Oct2008, Vol. 15 Issue 10, p102106 

    This paper presents two-fluid simulations of forced magnetic reconnection with finite electron inertia in a collisionless three-dimensional (3D) cube with periodic boundaries in all three directions. Comparisons are made to analogous two-dimensional (2D) simulations. Reconnection in this system...

  • Even harmonics generation of high frequency radiation in current-carrying plasmas. Ferrante, G.; Zarcone, M.; Uryupin, S. A. // Physics of Plasmas;May2005, Vol. 12 Issue 5, p052111 

    Generation of high frequency radiation harmonics in a current-carrying plasma is studied. The physical mechanism responsible for harmonics generation is provided by electron-ion collisions. The current in the plasma is sustained by a constant electric field. It is shown that the electron...

  • Enhanced relativistic harmonics by electron nanobunching. an der Brügge, D.; Pukhov, A. // Physics of Plasmas;Mar2010, Vol. 17 Issue 3, p033110 

    It is shown that when a few-cycle, relativistically intense, p-polarized laser pulse is obliquely incident on overdense plasma, the surface electrons may form ultrathin, highly compressed layers with a width of a few nanometers. These electron “nanobunches” emit synchrotron radiation...

  • Impulsive and transient excitation of Bohm--Gross waves in a dissipative plasma. Randriamboarison, Orelien C. // Physics of Plasmas;Jul97, Vol. 4 Issue 7, p2336 

    Derives analytical expressions for causal responses of a dissipative macroscopic plasma based on the resolution of the partial differential equation describing the external excitation of the Bohm-Gross longitudinal wave. Impulsive and harmonic solutions; Spatial Green's functions of the...

  • Dissipation of the Energy of a Fast Charged Particle in a Solid-State Plasma. Zhurenko, V. P.; Kononenko, S. I.; Karas�, V. I.; Muratov, V. I. // Plasma Physics Reports;Feb2003, Vol. 29 Issue 2, p130 

    Results are presented from experimental investigations of mechanisms for the dissipation of the energy of light ions in metal plasmas by using the method of secondary electron emission. It is shown that the coefficient of anisotropy of energy transfer from fast light ions is about 1.7. It is...

  • Flux limiting due to electron impact excitation energy loss. Catto, Peter J.; Krasheninnikov, Sergei // Physics of Plasmas;Feb96, Vol. 3 Issue 2, p461 

    Shows that large radiation losses in the electron energy balance equation due to electron impact excitation can cause the parallel scale length. Inclusion of an inelastic impact excitation operator to generate a steepening of the profile consistent with energy loss by line radiation...

  • Diagnostics for low-energy electrons in a two-frequency capacitively coupled plasma in Ar. Ishimaru, M.; Ohba, T.; Ohmori, T.; Yagisawa, T.; Kitajima, T.; Makabe, T. // Applied Physics Letters;2/18/2008, Vol. 92 Issue 7, p071501 

    An experimental procedure to investigate the spatiotemporal characteristics of electrons in the vicinity of mean energy in a radiofrequency plasma is proposed by using optical emission and absorption spectroscopy in Ar. The method employs optical kinetics of long-lived metastable atom Ar(1s5)...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics