Stress-based vapor sensing using resonant microbridges

Southworth, D. R.; Bellan, L. M.; Linzon, Y.; Craighead, H. G.; Parpia, J. M.
April 2010
Applied Physics Letters;4/19/2010, Vol. 96 Issue 16, p163503
Academic Journal
We demonstrate that silicon-polymer composite microbridges provide a robust means of water vapor detection at ambient pressure. Volumetric changes in the reactive polymer alter the tension in a doubly clamped structure leading to large and rapid changes in the resonance frequency. We demonstrate stress-based sensing of water vapor in ambient pressure nitrogen using doubly clamped buckled beams coated with a hygroscopic polymer. We show stress sensitivity of around 20 kPa (∼170 ppb of water vapor) and subsecond response time for coated microbridges.


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