TITLE

Oxygen-atmosphere heat treatment in spin-on doping process for improving the performance of crystalline silicon solar cells

AUTHOR(S)
Zhengxin Liu; Takato, Hidetaka; Togashi, Chiho; Sakata, Isao
PUB. DATE
April 2010
SOURCE
Applied Physics Letters;4/12/2010, Vol. 96 Issue 15, p153503
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Spin-on doping of phosphorus has been investigated and applied for the emitter fabrication of crystalline Si solar cells. Heat treatment in oxygen atmosphere at relatively low temperature of 550 °C prior to phosphorus diffusion is proved effective for improving solar cell performance, showing a conversion efficiency enhancement of more than 0.2% absolute. Internal quantum efficiency measurements show obvious enhancements at both short and long-wavelength regions. Secondary ion mass spectroscopy and Infrared absorption analysis reveal reduced C impurities after the heat treatment, possibly caused by burning the organic residues in the coated dopant source layer.
ACCESSION #
49193309

 

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