Fabrication of silicon nanopillar-based nanocapacitor arrays

Shih-wei Chang; Jihun Oh; Boles, Steven T.; Thompson, Carl V.
April 2010
Applied Physics Letters;4/12/2010, Vol. 96 Issue 15, p153108
Academic Journal
We report the fabrication of silicon nanopillar-based nanocapacitor arrays using metal-assisted etching in conjunction with electrodeposition. The high aspect ratio made possible by the catalyzed etching provides for an increased effective electrode area and hence a significant improvement in the capacitance density. Electroplated Ni electrode forms a conformal layer over the silicon nanopillars. Capacitance measurements show the expected trend as a function of pillar height and array period. The fabrication approach is simple, compatible with integration into standard silicon technology, and easily scalable.


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