Hydrogen in plasma-nanofabrication: Selective control of nanostructure heating and passivation

Wolter, Matthias; Levchenko, Igor; Kersten, Holger; Ostrikov, Kostya
March 2010
Applied Physics Letters;3/29/2010, Vol. 96 Issue 13, p133105
Academic Journal
The possibility of independent control of the surface fluxes of energy and hydrogen-containing radicals, thus enabling selective control of the nanostructure heating and passivation, is demonstrated. In situ energy flux measurements reveal that even a small addition of H2 to low-pressure Ar plasmas leads to a dramatic increase in the energy deposition through H recombination on the surface. The heat release is quenched by a sequential addition of a hydrocarbon precursor while the surface passivation remains effective. Such selective control offers an effective mechanism for deterministic control of the growth shape, crystallinity, and density of nanostructures in plasma-aided nanofabrication.


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