Characteristics of extreme ultraviolet emission from a discharge-produced potassium plasma for surface morphology application

Higashiguchi, Takeshi; Terauchi, Hiromitsu; Yugami, Noboru; Yatagai, Toyohiko; Sasaki, Wataru; D’Arcy, Rebekah; Dunne, Padraig; O’Sullivan, Gerry
March 2010
Applied Physics Letters;3/29/2010, Vol. 96 Issue 13, p131505
Academic Journal
We have demonstrated a discharge-produced microplasma extreme ultraviolet source based on a pure potassium vapor. Potassium ions produced strong broadband emission around 40 nm with a bandwidth of 8 nm (full width at half-maximum). The current-voltage characteristics of microdischarge suggest that the source operates in a hollow cathode mode. By comparison with atomic structure calculations, the broadband emission is found to be primarily due to 3d-3p transitions in potassium ions ranging from K2+ to K4+.


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