TITLE

Characteristics of extreme ultraviolet emission from a discharge-produced potassium plasma for surface morphology application

AUTHOR(S)
Higashiguchi, Takeshi; Terauchi, Hiromitsu; Yugami, Noboru; Yatagai, Toyohiko; Sasaki, Wataru; D’Arcy, Rebekah; Dunne, Padraig; O’Sullivan, Gerry
PUB. DATE
March 2010
SOURCE
Applied Physics Letters;3/29/2010, Vol. 96 Issue 13, p131505
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We have demonstrated a discharge-produced microplasma extreme ultraviolet source based on a pure potassium vapor. Potassium ions produced strong broadband emission around 40 nm with a bandwidth of 8 nm (full width at half-maximum). The current-voltage characteristics of microdischarge suggest that the source operates in a hollow cathode mode. By comparison with atomic structure calculations, the broadband emission is found to be primarily due to 3d-3p transitions in potassium ions ranging from K2+ to K4+.
ACCESSION #
48943864

 

Related Articles

  • Ion beam optimization to reduce EUV mask blank defacts. Kearney, Patrick; Goodwin, Frank // Solid State Technology;May2012, Vol. 55 Issue 4, p18 

    The article presents an analysis which aims to provide a possible solution to the problem of having many defects on extreme ultraviolet lithography (EUVL) masks due to the ion beam missing the target of the mask blank deposition system. EUVL masks are composed of a substrate coated with a...

  • Study of the generation of the 13.5-nm EUV radiation from Sn ions in a CO2 laser-produced plasma. Volkov, G.; Zaitsev, V.; Makarov, K.; Napartovich, A.; Rerikh, V.; Smakovskii, Yu.; Stepanov, A.; Cherkovets, V.; Rupasov, A.; Satov, Yu. // Plasma Physics Reports;Feb2010, Vol. 36 Issue 2, p129 

    Results are presented from experimental and theoretical studies of the efficiency of using a CO2 laser to create a high-power source of 13- to 14-nm EUV radiation for lithography. For a laser intensity of ~2 � 1011 W/cm2, a conversion efficiency of kEUV ? 1.5% was achieved on a plane solid...

  • Attosecond photonics: Probing molecular hydrogen. Graydon, Oliver // Nature Photonics;May2014, Vol. 8 Issue 5, p350 

    The article discusses the study done which reveals that the extreme ultraviolet (XUV) pump–probe measurements can be used to investigate the electronic and nuclear dynamics of molecular hydrogen and also informs that XUV pulses ionized the hydrogen molecules producing charges.

  • Angular ion emission characteristics of a laser triggered tin vacuum arc as light source for extreme ultraviolet lithography. Verbraak, Harald; Küpper, Felix; Jonkers, Jeroen; Bergmann, Klaus // Journal of Applied Physics;Nov2010, Vol. 108 Issue 9, p093304 

    The angular resolved emission of tin ions from a laser triggered vacuum arc to be used as light source for extreme ultraviolet lithography is presented. Ion energies of more than 200 keV for emission angles up to 50° with respect to the optical axis are observed. The angular emission...

  • Microdischarge extreme ultraviolet source with alkali metal vapor for surface morphology application. Higashiguchi, Takeshi; Terauchi, Hiromitsu; Otsuka, Takamitsu; Yamaguchi, Mami; Kikuchi, Keisuke; Yugami, Noboru; Yatagai, Toyohiko; Sasaki, Wataru; D'Arcy, Rebekah; Dunne, Padraig; O'Sullivan, Gerry // Journal of Applied Physics;Jan2011, Vol. 109 Issue 1, p013301 

    We have characterized a discharge-produced potassium plasma extreme ultraviolet (XUV) source. Potassium ions produced strong broadband emission around 40 nm with a bandwidth of 8 nm (full width at half-maximum). By comparison with atomic structure calculations, the broadband emission is found to...

  • The effect of viewing angle on the spectral behavior of a Gd plasma source near 6.7 nm. O'Gorman, Colm; Otsuka, Takamitsu; Yugami, Noboru; Jiang, Weihua; Endo, Akira; Li, Bowen; Cummins, Thomas; Dunne, Padraig; Sokell, Emma; O'Sullivan, Gerry; Higashiguchi, Takeshi // Applied Physics Letters;4/2/2012, Vol. 100 Issue 14, p141108 

    We have demonstrated the effect of viewing angle on the extreme ultraviolet (EUV) emission spectra of gadolinium (Gd) near 6.7 nm. The spectra are shown to have a strong dependence on viewing angle when produced with a laser pulse duration of 10 ns, which may be attributed to absorption by low...

  • Estimation of electron temperature and density of the decay plasma in a laser-assisted discharge plasma extreme ultraviolet source by using a modified Stark broadening method. Zhu, Qiushi; Muto, Takahiro; Yamada, Junzaburo; Kishi, Nozomu; Watanabe, Masato; Okino, Akitoshi; Horioka, Kazuhiko; Hotta, Eiki // Journal of Applied Physics;Dec2011, Vol. 110 Issue 12, p123302 

    In order to investigate the plasma expansion behaviors and the electrical recovery process after the maximum implosion in our tin fueled laser-assisted discharge plasma (LDP) 13.5 nm EUV source, we developed and evaluated a cost-efficient spectroscopic method to determine the electron...

  • Complementary ion and extreme ultra-violet spectrometer for laser-plasma diagnosis. Ter-Avetisyan, S.; Ramakrishna, B.; Doria, D.; Sarri, G.; Zepf, M.; Borghesi, M.; Ehrentraut, L.; Stiel, H.; Steinke, S.; Priebe, G.; Schnürer, M.; Nickles, P. V.; Sandner, W. // Review of Scientific Instruments;Oct2009, Vol. 80 Issue 10, p103302 

    Simultaneous detection of extreme ultra-violet (XUV) and ion emission along the same line of sight provides comprehensive insight into the evolution of plasmas. This type of combined spectroscopy is applied to diagnose laser interaction with a spray target. The use of a micro-channel-plate...

  • Three-Dimensionally Controlled Ion Milling for Reflection Phase Manipulation of EUV Multilayer Mirrors. Tsuru, T.; Hatano, T.; Yamamoto, M. // AIP Conference Proceedings;9/9/2011, Vol. 1365 Issue 1, p180 

    For accurate nm-figure error correction of EUV multilayer mirror optics, a three-dimensionally controlled ion milling method was developed. To demonstrate the reflection phase manipulation of an EUV multilayer, 10 periods of a 40-period Mo/Si multilayer were partially removed. A partially milled...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics